承担国家重大科研项目以及校企合作项目总经费超过七千万：

1. 国家科技重大专项“****运动控制技术研究”，项目负责人，2017.01-2020.12

2. 国家重点研发计划“高精度高稳定性运动台与控制技术”，项目负责人，2021.12-2026.11

3. 国家重点研发计划“超精密五轴真空工作台开发”，项目负责人， 2022.01-2024.12

4. 国家自然科学基金面上项目“具有双重电机的高加速精度光刻微运动台的驱动技术研究”，项目负责人，2013.01-2016.12

5. 上海市科委重大项目“光刻机高性能运动控制技术研发”，项目负责人，2018.11-2020.11

6. 季华实验室重大项目“光刻机物镜执行器和传感器研制” ，项目负责人，2018.09-2019.12

7. 长春国科“激光测长干涉仪研制”，，项目负责人2017.09-2019.05

8. 长春国科“6自由度纳米精度光刻机投影物镜可懂镜片补偿机构标定系统” ，项目负责人 2017.09-2019.05

9.校企合作项目“复旦-上海精测半导体联合实验室”，项目负责人2019.01-2021.12

10. 国家重点研发计划“多自由度非接触三维光学扫描仪”，参与人，2023.01-2025.12

11. 国家自然科学基金青年科学基金项目“小样本条件下基于深度学习的半导体制程关键尺寸故障诊断研究”，参与人，2023.01-2024.12

代表性论文：

1.Fu, X., Yang, X., Zanchetta, P., Tang, M., Liu, Y., & Chen, Z. (2022). An adaptive data-driven iterative feedforward tuning approach based on fast recursive algorithm: with application to a linear motor. IEEE Transactions on Industrial Informatics, 19(4), 6160-6169.

2.Li, Z., Xu, Y., Yang, X., Feng, J., & Fang, W. (2020). Generalized inverse multiplicative structure for differential-equation-based hysteresis models. IEEE Transactions on Industrial Electronics, 68(5), 4182-4189.

3.Fu, X., Yang, X., Zanchetta, P., Liu, Y., Ding, C., Tang, M., & Chen, Z. (2020). Frequency-domain data-driven adaptive iterative learning control approach: With application to wafer stage. IEEE Transactions on Industrial Electronics, 68(10), 9309-9318.

4.Song, F., Liu, Y., Xu, J. X., Yang, X., & Zhu, Q. (2018). Data-driven iterative feedforward tuning for a wafer stage: A high-order approach based on instrumental variables. IEEE Transactions on Industrial Electronics, 66(4), 3106-3116.

5.Song, F., Liu, Y., Xu, J. X., Yang, X., He, P., & Yang, Z. (2017). Iterative learning identification and compensation of space-periodic disturbance in PMLSM systems with time delay. IEEE Transactions on Industrial Electronics, 65(9), 7579-7589.

6.Xu, Y., Li, X., Yang, X., Yang, Z., Wu, L., & Chen, Q. (2020). A two-stage model for rate-dependent inverse hysteresis in reluctance actuators. Mechanical Systems and Signal Processing, 135, 106427.

7.Su, X., Xu, Y., & Yang, X. (2022). Neural network adaptive sliding mode control without overestimation for a maglev system. Mechanical Systems and Signal Processing, 168, 108661.

8.Xu, Y., Yang, Z., Li, X., Kang, H., & Yang, X. (2020). Dynamic opposite learning enhanced teaching–learning-based optimization. Knowledge-Based Systems, 188, 104966.

9.Xu, Y., Peng, Y., Su, X., Yang, Z., Ding, C., & Yang, X. (2022). Improving teaching–learning-based-optimization algorithm by a distance-fitness learning strategy. Knowledge-Based Systems, 257, 108271.

10.Liu, Y., Li, L., Yang, X., & Tan, J. (2020). Enhanced kalman-filtering iterative learning control with application to a wafer scanner. Information Sciences, 541, 152-165.

代表性专利：

1.磁悬浮导向装置及其控制系统和控制方法201610240775.5

2.磁悬浮导向装置及其控制方法201610240783.X

3.压电陶瓷d15参数测量装置201921057763.4

4.压电陶瓷电机动子装配工装201921048826.X

5.用于形成闪耀光栅的方法201910427560.8

6.具有法布里珀罗腔的闪耀光栅及其制造方法201910427562.7

7.读数头和二维位移测量系统及测量方法202010442531.1

8.光刻机运动平台及其微运动平台和控制方法201710007443.7

9.平面电机位移装置202020938774.X

10.读数头和位移测量系统及位移测量方法202011391427.0

11.一种用于磁悬浮导轨悬浮间隙测量的光学方法及装置201911180837.8

代表性著作：

1.杨晓峰 等，《精“芯”打造集成电路的制造设备》上海科学普及出版社。