张志平

  职称:青年研究员,硕士生导师

  电子邮箱:zzp8101@163.com



个人简介:

2008年获中科院上海光机所光学工程博士学位,2008-2017年在上海微电子装备有限公司工作,2017年进入复旦大学工研院。主要从事超精密光电检测技术研究及产品开发,作为负责人成功研制“0.15nm测量分辨率的双频激光干涉仪”产品,年产值三千多万元,成功应用于光刻机、超精密位移检测等领域,具有丰富的产品开发及工程经验。发表论文18篇,申请专利24项,授权专利9项,参与编写《光子学技术与应用》(第十五分篇“激光加工技术”)。  



代表论文:


1.张志平,程兆谷,覃兆宇,朱健强. 加速度对激光双频干涉仪测量误差的影响,中国激光2007, 345

2. Zhiping Zhang, Zhaogu Cheng, Zhaoyu Qin, Jianqiang Zhu. Measuring of the maximum measurable velocity for dual-frequency laser interferometerChinese Optics Letters2007, 54

3. Zhiping Zhang, Zhaogu Cheng, Zhaoyu Qin, Jianqiang Zhu. Modeling and simulating of the second-order Doppler error of laser dual-frequency interferometerMeasurement Science and Technology200718

4. Zhiping Zhang, Zhaogu Cheng, Zhaoyu Qin, Jianqiang Zhu. The micro-gal absolute gravimeter based on high precision heterodyne interferometerChinese Optics Letters2007, 56

5. Zhiping Zhang, Zhaogu Cheng, Zhaoyu Qin, Jianqiang Zhu. The Second-order Doppler Error of Laser Dual-frequency InterferometerLPM2007

6. Zhiping Zhang, Zhaogu Cheng, Zhaoyu Qin, Jianqiang Zhu. A novel optical subdivision method for dual-frequency interferometer, Opt. Int. J. Light Electron. Opt. 2007

7.Zhaogu Cheng, Zhiping Zhang, Jianqiang Zhu.Self-adaptive control optical systems for long-distance flying opticsApplied Optics, 2006, 45(18)

8.Zhaogu Cheng, Zhiping ZhangStudy on hybrid laser welding with novel self-adaptive optical device for shipbuilding applications. LAMP2006, Invited paper. 2006, Kyoto, Japan

  

代表专利:


1.张志平,吴萍,王珍媛,张晓文,池峰,陈勇辉.双频激光器.申请号:201010619286.3

2.张志平,肖鹏飞,张晓文,池峰,陈勇辉.一种双频激光干涉仪.申请号:200910052180.7

3.张志平,肖鹏飞,张晓文,池峰,陈勇辉.一种检测反射镜入射角的装置.申请号:200920210088.4

4.张志平,程兆谷,高海军,覃兆宇.具有散射光强倍增系统的硅片表面缺陷检测仪.申请号:200510027682.6